Author:
Chen C.Q.,Ang G.B.,Ng P.T.,Rivai Francis,Neo S.P.,Nagalingam D.,Yip K.H.,Lam Jeffery,Mai Z.H.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Advantage of AFP Nanoprobing on the 28nm Technology Failure Analysis, ISTFA;Chen,2013
2. Defect Localization Enhancement Using Light Induced CI-AFP, IPFA;Dayanand,2014
3. Method for the study of semiconductor device operation using scanning capacitance microscopy;Nakakura;Rev. Sci. Instrum.,2003
4. Use of scanning capacitance microscopy for controlling wafer processing;Jeandupeux;Microelectron. Reliab.,2002