Estimating effective dielectric thickness for capacitors with extrinsic defects by a statistical method
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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3. Assessing the reliability of silicon nitride capacitors in a GaAs IC process;Yeats;IEEE Trans Electron Dev,1998
4. van der Wel PJ, et al. Reliability assessment of extrinsic defects in SiNx metal-insulator-metal capacitors. In: Proceedings of the 2006 ROCS Workshop; 2006, p. 35–40.
5. A TDDB Model of Si3N4 – based capacitors in GaAs MMICs;Scarpulla,1999
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