Author:
Marro James,Okoro Chukwudi,Obeng Yaw,Richardson Kathleen
Funder
National Institute of Standards and Technology (NIST) Semiconductor and Dimensional Metrology Division
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference28 articles.
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