Technology scaling implications for BTI reliability

Author:

Ramey S.M.,Prasad C.,Rahman A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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3. T. Ghani, et al., A 90 nm high volume manufacturing logic technology featuring novel 45 nm gate length strained Silicon CMOS transistors, in Proc. 2003 IEEE International Electron Devices Meeting, pp. 11.6.1–11.6.3.

4. K. Mistry, et al., A 45 nm logic technology with high-k + metal gate transistors, strained silicon, 9 Cu interconnect layers, 193 nm dry patterning, and 100% Pb-free packaging, in Proc. 2007 IEEE International Electron Devices Meeting, pp. 247–250.

5. C. Auth, et al., A 22 nm high performance and low-power CMOS technology featuring fully-depleted tri-gate transistors, self-aligned contacts and high density MIM capacitors, in Proc. 2012 Symposium on VLSI Technology, pp. 131–132.

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