Author:
Lee Simone,Ramadoss Ramesh,Buck Michael,Bright V.M.,Gupta K.C.,Lee Y.C.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference7 articles.
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4. Lifetime characterization of capacitive RF MEMS switches;Goldsmith;IEEE MTT-S Digest,2000
5. Van Spengen WM, Puers R, Mertens I. DeWolf, Experimental characterization of stiction due to charging in RF MEMS. In: Proceedings of IEEE International Electron Devices Meeting (IEDM), 2002. p. 901–4
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