Automated endpointing in microelectronics failure analysis using laser induced breakdown spectroscopy-Reference-Cited by-同舟云学术

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Automated endpointing in microelectronics failure analysis using laser induced breakdown spectroscopy

Published:2023-11 Issue: Volume:150 Page:115224
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Hoveida Pouria,Phoulady Adrian,Choi Hongbin,Suleiman Yara,May Nicholas,Moore Toni,Shahbazmohamadi Sina,Tavousi Pouya

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications;Li;Nanoscale,2021

2. A review of focused ion beam applications in optical fibers;Sloyan;Nanotechnology,2021

3. Effect of ion irradiation introduced by focused ion-beam milling on the mechanical behaviour of sub-micron-sized samples;Liu;Sci. Rep.,2020

4. X-ray photoelectron spectroscopy: towards reliable binding energy referencing;Greczynski;Prog. Mater. Sci.,2020

5. Practical guides for x-ray photoelectron spectroscopy (XPS): interpreting the carbon 1s spectrum;Gengenbach;J. Vac. Sci. Technol. A,2021

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