The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems-Reference-Cited by-同舟云学术

The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems

Published:2012-01 Issue:1 Volume:52 Page:271-281
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Ardito R.,Frangi A.,Corigliano A.,De Masi B.,Cazzaniga G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference56 articles.

1. Ardito R, Baldasarre L, Corigliano A. On the numerical evaluation of capacitance and electrostatic forces in MEMS. In: Ernst LJ et al., editor. EuroSimE2009 – Proc. of the 10th international conference on thermal, mechanical and multiphysics simulation and experiments in micro-electronics and micro-systems; 2009. p. 583–90.

2. Numerical assessment of simplified formulas for electrostatic simulation and design of Micro-Electro-Mechanical Systems (MEMS);Ardito;Asigurarea Calitatii,2010

3. Determination of the adhesion energy of MEMS structures by applying Weibull-type distribution function;Bachmann;Sensor Actuat A-Phys,2006

4. Scaling of micro- and nanodevices actuated by Casimir forces;Bárcenas;Appl Phys Lett,2005

5. Pull-in instability in electrostatically actuated MEMS due to Coulomb and Casimir forces;Batra,2008

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