Author:
Ye M.,Hu X.L.,Sun L.B.,Shi B.,Xu Y.,Wang L.S.,Zhao J.,Wu Y.Q.,Yang S.M.,Tai R.Z.,Jiang J.Z.,Zhang D.X.
Funder
National Natural Science Foundation of China
National Key Basic Research Program of China
Natural Science Foundation of Zhejiang Province
Fundamental Research Funds
Soft-X Ray Interference Lithography Beamline
Open Research Project of Large Scientific Facility from Chinese Academy of Sciences
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Cited by
9 articles.
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