Author:
Du Peng,Luo Laihui,Li Weiping,Yan Feng,Xing Guozhong
Funder
Natural Science Foundation of Ningbo
Ningbo University
key research and development plan of Zhejiang Province
Key Laboratory of Microelectronic Devices and Integrated Technology
Institute of Microelectronics
Chinese Academy of Sciences
National Key R&D Program
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
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