Cu-based nano-multilayer film produced by HiPIMS for antimicrobial properties and its application in photodetector

Author:

Chang Chi-Lung,Lin Chun-Cheng,Huang Po-Yuan,Tang Jian-Fu

Funder

National Science and Technology Council

Publisher

Elsevier BV

Reference41 articles.

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4. Synthesis and characterization of c-TiAlN/h-Cr2N multilayer films deposited by magnetron sputtering on Si (100) substrates;Ma;J. Alloy. Compd.,2024

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