Flexible Al-Ti-Zn-O MIM capacitors fabricated by room temperature atomic layer deposition and their electrical performances-Reference-Cited by-同舟云学术

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Flexible Al-Ti-Zn-O MIM capacitors fabricated by room temperature atomic layer deposition and their electrical performances

Published:2021-07 Issue: Volume:870 Page:159391
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Lei Jin,Fang Chang,Liu Chang,Wu Di,Li Ai-Dong

Funder

Huawei Technologies Co Ltd

Major Basic Research Project of the Natural Science Foundation of the Jiangsu Higher Education Institutions

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference33 articles.

1. Nanomesh on-skin electronics;Rogers;Nat. Nanotechnol.,2017

2. Real-time glucose monitoring system containing enzymatic sensor and enzymatic reference electrodes;Ramasauskas;Biosens. Bioelectron.,2020

3. Self-powered human-health monitoring through aligned PVDF nanofibers interfaced skin-interactive piezoelectric sensor;Maity;ACS Appl. Polym. Mater.,2020

4. High-performance MIM capacitors using Zr-Sn-Ti-O dielectrics derived from atomic layer deposition;Fang;IEEE Electron Device Lett.,2019

5. Role of film stoichiometry and interface quality in the performance of (Ba,Sr)TiO3 tunable capacitors with high figures of merit;Freeze;Appl. Phys. Lett.,2016

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1. Interpretable machine learning boosting the discovery of targeted organometallic compounds with optimal bandgap;Materials Today Advances;2024-08

2. Crystallinity-Controlled Atomic Layer Deposition of Ti-Doped ZrO₂ Thin Films;ECS Advances;2024-01-11

3. Leakage Current Minimization of TiO₂-Based Metal–Insulator–Metal Capacitors Using High-Work-Function In₂O₃ and V₂O₅ Ultrathin Interlayers;IEEE Transactions on Electron Devices;2023-08

4. Improvement of Voltage Linearity and Leakage Current of MIM Capacitors With Atomic Layer Deposited Ti-Doped ZrO₂ Insulators;IEEE Transactions on Electron Devices;2023-06

5. The Second Generation of Integrated Stack Capacitor (ISC) for Power Integrity Improvement;2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM);2023-05

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