Improved dielectric constant and leakage current characteristics of BaTiO3 thin film on SrRuO3 seed layer
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference21 articles.
1. Process-property relationship in high-k ALD SrTiO3 and BaTiO3: a review;Shim;J. Mater. Chem. C.,2017
2. Electrical properties of sol-gel processed amorphous BaTiO3 thin films;Thomas;J. Sol. -Gel Sci. Technol.,1999
3. Ferroelectric properties of barium titanate thin films grown on nichrome substrates by RF sputtering;Márquez-Herrera;J. Mater. Sci.,2005
4. , Optical characterization and microstructure of BaTiO3 thin films obtained by RF-magnetron sputtering;Ianculescu;Appl. Surf. Sci.,2006
5. Seed layer mediated growth of high dielectric and low leakage BaTiO3 thin film using two-step sputtering process;Kang;Ceram. Int.,2021
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