The influence of barrier layers (SiO2, Al2O3, W) on the phase formation and stability of RuAl thin films on LGS and CTGS substrates for surface acoustic wave technology-Reference-Cited by-同舟云学术

The influence of barrier layers (SiO2, Al2O3, W) on the phase formation and stability of RuAl thin films on LGS and CTGS substrates for surface acoustic wave technology

Published:2016-12 Issue: Volume:688 Page:228-240
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Seifert Marietta^ORCID,Rane Gayatri K.,Menzel Siegfried B.,Gemming Thomas

Funder

German BMBF

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference21 articles.

1. Platinum and palladium high-temperature transducers on langasite;Thiele;IEEE Trans. Ultrason. Ferroelect. Freq. Contr,2005

2. The growth and properties of Ca3 TaGa3 Si2O14 single crystals;Wang;J. Cryst. Growth,2003

3. Behavior of platinum/tantalum as interdigital transducers for SAW devices in high-temperature environments

4. Iridium interdigital transducers for high-temperature surface acoustic wave applications;Aubert;IEEE Trans. Ultrason. Ferroelect. Freq. Contr,2012

5. Ir-Rh thin films as high-temperature electrodes for surface acoustic wave sensor applications;Taguett;Sens. Actuat. A,2016

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