Surface roughness, mechanical properties and bonding structure of silicon carbon nitride films grown by dual ion beam sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference33 articles.
1. Bonding characterization and nano-indentation study of the amorphous SiCxNy films with and without hydrogen incorporation
2. Deposition of silicon carbon nitride thin films by microwave ECR plasma enhanced unbalance magnetron sputtering
3. Microstructure and mechanical properties of SiCN hard films deposited by an arc enhanced magnetic sputtering hybrid system
4. Relationship of chemical and structural properties with the tribological behavior of sputtered SiCN films
5. Influence of nitrogen ion implantation energies on surface chemical bonding structure and mechanical properties of nitrogen-implanted silicon carbide ceramics
Cited by 29 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Improving the high temperature oxidation resistance of TiAl alloy by SiOC coating;Journal of Materials Research and Technology;2023-11
2. SiOC films on C/C composite prepared by chemical vapor deposition with hexamethyldisilazane precursor;Ceramics International;2022-07
3. Silicon doped carbon nanotubes as high energy anode for lithium-ion batteries;Materials Today Communications;2022-03
4. Mechanical properties of amorphous SiCN films deposited by ion-beam-assisted deposition;Diamond and Related Materials;2022-01
5. High-rate synthesis of SiCN films using single-source silicon precursor with high-density helicon plasma;Vacuum;2020-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3