Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference18 articles.
1. Physical vapor deposition tool coatings
2. New hard/lubricant coating for dry machining
3. Microstructure and oxidation-resistance of Ti1 − x − y −zAlxCryYzN layers grown by combined steered-arc/unbalanced-magnetron-sputter deposition
4. Thermal stability and oxidation resistance of TiAlN/CrN multilayer coatings
5. Thermal stability of hard TiN/SiNx multilayer coatings with an equiaxed microstructure
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