Structure and mechanical properties of Ti–Al–N coatings deposited by combined cathodic arc middle frequency magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference21 articles.
1. TiAlN coatings deposited by r.f. magnetron sputtering on previously treated ASTM A36 steel
2. A comparative study on tribological behavior of TiN and TiAlN coatings prepared by arc ion plating technique
3. TiAlN film preparation by Y-shape filtered-arc-deposition system
4. Electron microscopy analysis of the microstructure of Ti1−xAlxN alloy thin films prepared using a chemical vapour deposition method
5. Effect of Si content on the properties of TiAl–Si–N films deposited by closed field unbalanced magnetron sputtering with vertical magnetron sources
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Microstructures and friction–wear performances of cathodic arc ion plated TiAlN coatings on YT14 cemented carbide cutting tools;Journal of Materials Research;2017-03-21
2. Effects of RF inductively coupled plasma ion source on the microstructure and mechanical properties of Ti–Al–N nanocrystalline films;Applied Physics A;2016-03-07
3. Effects of Al concentrations on the microstructure and mechanical properties of Ti–Al–N films deposited by RF-ICPIS enhanced magnetron sputtering;Journal of Alloys and Compounds;2014-10
4. Production of Ti–Al–Si–B–N Films by Magnetron Sputtering and Study of Their Mechanical Properties;Powder Metallurgy and Metal Ceramics;2014-09
5. Ti-Si-N films prepared by magnetron sputtering;Rare Metals;2012-03-30
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