Large-area thin-film capacitors deposited onto graphene bottom electrodes via facing-target sputtering that is free of plasma damage-Reference-Cited by-同舟云学术

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Large-area thin-film capacitors deposited onto graphene bottom electrodes via facing-target sputtering that is free of plasma damage

Published:2017-02 Issue: Volume:695 Page:2886-2893
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Kim Jae-Hee,Park Byeong-Ju,Eom Ji-Ho,Yoon Soon-Gil

Funder

National Research Foundation of Korea

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference23 articles.

1. Improved dielectric properties of lead zirconate titanate thin films deposited on metal foils with LaNiO3 buffer layers;Zou;Appl. Phys. Lett.,2001

2. Lead zirconate titanate thin films on base-metal foils;Maria;J. Am. Ceram. Soc.,2001

3. Ca-doped lead zirconate titanate thin film capacitors on base metal nickel on copper foil;Kim;J. Mater. Res.,2004

4. Bismuth-zinc-niobate embedded capacitors grown at room temperature for printed circuit board applications;Park;Appl. Phys. Lett.,2006

5. Realization of a high capacitance density in Bi2Mg2/3Nb4/3O7 pyrochlore thin films deposited directly on polymer substrates for embedded capacitor applications;Park;Appl. Phys. Lett.,2006

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