Structural and electrical characteristics of highly textured oxidation-free Ru thin films by DC magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference20 articles.
1. Deposition of biaxially-oriented metal and oxide buffer-layer films on textured Ni tapes: new substrates for high-current, high-temperature superconductors
2. High critical current density superconducting tapes by epitaxial deposition of YBa2Cu3Ox thick films on biaxially textured metals
3. Growth of biaxially textured RE2O3buffer layers on rolled-Ni substrates using reactive evaporation for HTS-coated conductors
4. Ultrathin Ta2 O 5 Film Capacitor with Ru Bottom Electrode
5. Chemical Vapor Deposition of Ru and Its Application in (Ba,Sr)TiO3Capacitors for Future Dynamic Random Access Memories
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1. Effectiveness of Sensors Contact Metallization (Ti, Au, and Ru) and Biofunctionalization for Escherichia coli Detection;Sensors;2018-09-02
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