Effect of chamber pressure and hydrogen on the formation of C3N4 films deposited on quartz substrates via MPCVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference22 articles.
1. Calculation of bulk moduli of diamond and zinc-blende solids
2. Prediction of New Low Compressibility Solids
3. Formation of the crystalline β-C3N4 phase by dual ion beam sputtering deposition
4. First-principles study on hardness of five polymorphs of C3N4
5. Growth of carbon nitride using microwave plasma CVD
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1. Field emission properties of carbon nitride synthesized by microwave plasma chemical vapor deposition;Thin Solid Films;2019-02
2. Direct Fractographic Evaluation of Multilayer CNx/TiN Films by Magnetron Sputtering;MRS Advances;2018-01-02
3. Novel β-C3N4/CuO nanoflakes: facile synthesis and unique photocatalytic performance;Journal of Physics D: Applied Physics;2017-08-14
4. Solvent-free catalytic synthesis and optical properties of super-hard phase ultrafine carbon nitride nanowires with abundant surface active sites;RSC Advances;2016
5. Low-temperature synthesis of carbon nitride by microwave plasma CVD;Japanese Journal of Applied Physics;2015-12-02
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