Effect of growth and annealing temperatures on crystallization of tantalum pentoxide thin film prepared by RF magnetron sputtering method
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference23 articles.
1. Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications
2. Design of ion-implanted MOSFET's with very small physical dimensions
3. Dielectric constants of Ta2O5 thin films deposited by r.f. sputtering
4. Thin RF sputtered and thermal Ta2O5 on Si for high density DRAM application
5. Optical and durability properties of infrared transmitting thin films
Cited by 50 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Investigation of residual stresses measured during laser surface modification of tantalum coated steel substrates;Cogent Engineering;2024-09
2. Crystallographic dependence of the electrical transport mechanism in La-Mn-O thermosensitive thin films;Journal of Alloys and Compounds;2024-02
3. Structural, electronic, thermoelectric, and optical investigations on Cr substituted Ta2O5;Optical Materials;2024-02
4. Microstructure and Performance of Compositionally Graded Ta2o5/Ti Thin Films on Ti6al4v Alloy Deposited by Magnetron Sputtering;2024
5. Tribological Characteristics of Tantalum-Oxide Coating Fabricated on Pre-Treated 2024 Aluminum Alloys;Journal of Tribology;2023-06-26
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3