Thin-film temperature sensor made from particle-filled polymer-derived ceramics pyrolyzed in vacuum

Author:

Cui Zaifu,Li Xin,Chen Guochun,Wu Chao,He Gonghan,Hai Zhenyin,Chen Qinnan,Sun Daoheng

Publisher

Elsevier BV

Subject

Materials Chemistry,Ceramics and Composites

Reference25 articles.

1. Chapter 7 - Polymer-Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics †;Riedel,2010

2. Fabrication and Characterization of Heat Flux Sensor Using Polymer Derived Ceramics;Jung,2011

3. Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors;Seo;Sens. Actuators A Phys.,2011

4. Fabrication using filler controlled pyrolysis and characterization of polysilazane PDC RTD arrays on quartz wafers;Jung;Sens. Actuators A Phys.,2012

5. Polymer derived ceramics in MEMS/NEMS – a review on production processes and application;Schulz;Br. Ceram. Trans.,2009

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