Author:
Kurosawa Minoru,Fukuda Yoshimitsu,Takasaki Masaya,Higuchi Toshiro
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Silicon monolithic micromechanieal gyroscope;Greiff,1991
2. Silicon rate sensor using anisotropic etching technology;Maenaka,1993
3. A micromachined comb-drive fork rate gyroscope;Bernstein,1993
4. A micromachined vibrating gyroscope;Tanaka,1995
5. Analysis of a highly sensitive silicon gyroscope with cantilevr beam as vibrating mass;Maenaka;Sensors and Actuators A,1996
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