Concave corner compensation between vertical (010)-(001) planes anisotropically etched in Si (100)-Reference-Cited by-同舟云学术

Concave corner compensation between vertical (010)-(001) planes anisotropically etched in Si (100)

Published:1998-04 Issue:1-3 Volume:66 Page:299-307
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Nikpour B.,Landsberger L.M.,Hubbard T.J.,Kahrizi M.,Iftimie A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. A method to etch undoped silicon cantilever beams;Choi;IEEE J. Microelectromech. Syst.,1993

2. On hillocks generated during anisotropic etching in Si in TMAH;Landsberger;IEEE J. Microelectromech. Syst.,1996

3. Processes to achieve vibrating beams lor an angular rate measurement sensor;Nikpour,1996

4. Emergent faces in silicon micromachining;Hubbard;IEEE J. Microelectromech. Syst.,1993

5. Design of MEMS via efficient simulation of fabrication;Hubbard,1996

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