Author:
Peiner E.,Scholz D.,Schlachetzki A.,Hauptmann P.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. A smart resonant sensor fabricated by Si MST for online vibration control of rotating machinery;Scholz,1996
2. An online vibration control system for rotating machinery based on smart sensors fabricated by Si MST;Scholz,1996
3. MEMS versus MOMS from a systems point of view;Jacobs-Cook;J. Micromech. Microeng.,1996
4. Fibre optic sensor: integration with micromachined devices;Culshaw;Sensors and Actuators A,1995
5. An integrated silicon interferometric temperature sensor;Cocorullo,1996
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