Mechanical sensors integrated in a commercial CMOS technology-Reference-Cited by-同舟云学术

Mechanical sensors integrated in a commercial CMOS technology

Published:1997-07 Issue:1-3 Volume:62 Page:698-704
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bausells J.,Carrabina J.,Merlos A.,Bota S.,Samitier J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Microtransducers by industrial IC technology and micromachining;Baltes,1991

2. CMOS as sensor technology;Baltes;Sensors and Actuators A,1993

3. Sensor technology strategy in silicon;Sarro;Sensors' and Actuators A,1992

4. Silicon pressure sensor with integrated CMOS signal-conditioning circuit and compensation of temperature coefficient;Kress;Sensors and Actuators A,1991

5. A smart accelerometer with on-chip electronics fabricated by a commercial CMOS process;Riethmiiller;Sensors' andActuators A,1992

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