Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs-Reference-Cited by-同舟云学术

Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs

Published:1998-01 Issue:1 Volume:64 Page:69-76
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Park Kyu-Yeon,Lee Chong-Won,Oh Yong-Su,Cho Young-Ho

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish hook shape springs;Park,1997

2. A micromachined comb-drive tuning fork gyroscope;Bernstein,1993

3. Surface micromachined Z-axis vibratory rate gyroscope;Clark,1996

4. Micromachined dual input axis angular rate sensor;Juneau,1996

5. Operation of submicron gap electrostatic comb-drive actuators;Hirano,1991

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