Surface-micromachined electrostatic microrelay-Reference-Cited by-同舟云学术

Surface-micromachined electrostatic microrelay

Published:1998-04 Issue:1-3 Volume:66 Page:345-354
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Schiele Ignaz,Huber Jörg,Hillerich Bernd,Kozlowski Frank

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Micromechanical membrane switches on silicon;Petersen;IBM J. Res. Develop.,1979

2. Silicon-microrelay with electrostatic moving wedge actuator — new functions and miniaturisation by micromechanics;Schlaak;Micro System Technologies,1996

3. An electrostatically actuated micro-relay;Drake,1995

4. Mercury-contact switching with gap-closing microcantilever;Simon,1996

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