Micromachined silicon bolometers as detectors of soft X-ray, ultraviolet, visible and infrared radiation
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference10 articles.
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5. Uncooled sensor technology;Horn,1993
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