Design optimization of bistable microdiaphragm valves-Reference-Cited by-同舟云学术

Design optimization of bistable microdiaphragm valves

Published:1998-01 Issue:3 Volume:64 Page:259-264
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Schomburg W.K.,Goll C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. A new bistable microvalve using an SiO2 beam as the movable part;Babaei,1994

2. Silicon active microvalves using buckled membranes for actuation;Popescu,1995

3. Bistable microvalves for implantable drug delivery systems;Wagner,1996

4. Microvalves with bistable buckled polymer diaphragms;Goll;J. Micromech. Microeng.,1996

5. Mechanical properties of thin films of gold and silver;Beams,1959

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