Theoretical model of performance of a silicon piezoresistive pressure sensor-Reference-Cited by-同舟云学术

Theoretical model of performance of a silicon piezoresistive pressure sensor

Published:1996-12 Issue:3 Volume:57 Page:245-252
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Perraud Eric

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

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