Microstructing of silicon by electro-discharge machining (EDM) — part II: applications-Reference-Cited by-同舟云学术

Microstructing of silicon by electro-discharge machining (EDM) — part II: applications

Published:1997-06 Issue:1-3 Volume:61 Page:379-386
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Heeren Paul-Henri's,Reynaerts Dominiek,Van Brussel Hendrik,Beuret Cynthia,Larsson Olle,Bertholds Axel

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Micro spark erosion;van Osenbruggen;Philips Technisch Tijdschrift,1969

2. Micro electro discharge machining and its applications;Masaki,1990

3. Drilling of deep microboles by EDM;Masuzawa;Annals CIRP,1989

4. Self-aligned machining and assembly of high aspect ratio microparts into silicon;Langen,1995

5. Micro electro-discharge machining technologies;Masaki;National Technical Report,1993

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