Chemical etching of Y-rotated quartz plates: experiments and theoretical approach-Reference-Cited by-同舟云学术

Chemical etching of Y-rotated quartz plates: experiments and theoretical approach

Published:1997-06 Issue:1-3 Volume:61 Page:405-414
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Leblois T.,Tellier C.R.,Messaoudi T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Technology and characteristics of chemically mitled miniature quartz crystals;Studer,1990

2. Quartz crystal micromechanical devices;Ueda,1985

3. Micromachining of quartz and its application to an acceleration sensor;Danel;Sensors and Actuators,1990

4. Micromachined gyroscopes;Soderkvist;Sensors and Actuators A,1994

5. Chemically polished quartz;Vig,1977

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