Author:
Idogaki Takaharu,Tominaga Takayuki,Senda Kouji,Ohya Nobuyuki,Hattori Tadashi
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Micromechanism;Hayashi;J. Jpn. Soc. Precision Eng.,1991
2. Design considerations for microfabricated electric actuators;Bart;Sensors and Actuators,1988
3. RF-magnetron sputtering of piezoelectric lead-zirconate-titanate actuator films using composite targets;Abe,1994
4. Preparation and switching kinetics of Pb(Zr,Ti)O3 thin films deposited by reactive sputtering;Hase;Jpn. J. Appl. Phys.,1991
5. Distributed electrostatic micro actuator;Yamaguti,1993
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