Silicon resonator sensor systems using self-mixing interferometry-Reference-Cited by-同舟云学术

Silicon resonator sensor systems using self-mixing interferometry

Published:1996-07 Issue:2-3 Volume:55 Page:71-77
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Hauptmann M.A.,Grattan K.T.V.,Palmer A.W.,Fritsch H.,Lucklum R.,Hauptmann P.R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

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4. Silicon sensors in Western Europe;Bogue,1993

5. Silicon Sensors and Circuits: On Chip Compatibility;Wolffenbuttel,1996

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