A pure CMOS surface-micromachined integrated accelerometer-Reference-Cited by-同舟云学术

A pure CMOS surface-micromachined integrated accelerometer

Published:1996-11 Issue:2 Volume:57 Page:111-116
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Hierold Christofer,Hildebrandt Andreas,Na¨her Ulrich,Scheiter Thomas,Mensching Bernd,Steger Max,Tielert Reinhard

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. CMOS compatible capacitive pressure sensor with read-out electronics;Kandler,1990

2. Fabrication technology for an integrated surface-micromachined sensor;Core;Solid State Technol.,1993

3. Deformable-mirror spatial light modulators;Hornbeck,1989

4. Surface micromachining for microsensors and microactuators;Howe;J. Vac. Sci. Technol. B,1988

5. Fabrication of micromechanical devices from polysilicon films with smooth surfaces;Guckel;Sensors and Actuators,1989

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