Author:
Noetzel J,Tønnesen T,Benecke W,Binder J,Mader G
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. Fabrication and characterization of silicon micromachined threshold accelerometer;Loke;Sensors and Actuators A,1991
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