Micro gas-flow sensor with integrated heat sink and flow guide-Reference-Cited by-同舟云学术

Micro gas-flow sensor with integrated heat sink and flow guide

Published:1996-06 Issue:1-3 Volume:54 Page:547-551
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Qiu Li,Hein Stefan,Obermeier Ernst,Schubert Axel

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Environmentally rugged, wide dynamic range microstructure airflow sensor;Ohnstein,1990

2. A microtransducer for air flow and differential pressure sensing applications;Hocker,1991

3. Analytical 2D-model of CMOS micromachined gas flow sensors;Wachutka,1991

4. Flow-rate microsensor modeling and optimization;Stewart;Sensors and Actuators A,1992

5. High-precision, high-performance mass flow sensor with integrated laminar flow microchannels;Petersen,1985

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