Silicon tube structures for a fluid-density sensor-Reference-Cited by-同舟云学术

Silicon tube structures for a fluid-density sensor

Published:1996-06 Issue:1-3 Volume:54 Page:558-562
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Enoksson Peter,Stemme Göran,Stemme Erik

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference4 articles.

1. Measuring liquid density with a tunning-fork transducer;Stemme;IEEE Trans. Instrum. Meas.,1983

2. Dichtemessungen an Flüssigkeiten und Gasen auf 10−6g/cm3 bei 0.6 cm3 Präparat volumen;Kratky;Z. Angew. Phys.,1969

3. Fluid density sensor based on resonance vibration;Enoksson;Sensors and Actuators A,1995

4. Vibration modes of a resonant silicon tube density sensor;Enoksson;J. Microelectromech. Syst.,1996

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