Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component-Reference-Cited by-同舟云学术

Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component

Published:1997-06 Issue:1-3 Volume:61 Page:449-454
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Marxer C.,Gre´tillat M.-A.,de Rooij N.F.,Ba¨ttig R.,Anthamatten O.,Valk B.,Vogel P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Megahertz opto-mechanical modulator;Marxer;Sensors and Actuators A,1996

2. Quality and Reliability of Technical Systems;Birolini,1994

3. Fracture strain of LPCVD polysilicon;Tai,1988

4. Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum;Jaecklin;Sensors and Actuators A,1994

5. Dislocation dynamics and the brittle-ductile transition in precracked silicon;Hirsch,1989

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