Author:
Bao Minhang,Sun Yuancheng,Yang Heng,Wang Jinsuo
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Stress concentration structure with front beam for pressure sensor;Bao;Sens. Actuators,1991
2. A high-sensitivity ribbed and bossed pressure transducer;Johnson;Sens. Actuators,1992
3. S. Hein, V. Schlichting, E. Obermeier, Piezoresistive silicon sensor for very low pressure based on the concept of stress concentration, in: Proceedings of the Transducers’93, 1993, pp. 628–631.
4. A pressure transducer with a single-sided multilevel structure by maskless etching technology;Yang;Mechatronics,1998
5. Vacuum-sealed silicon micromachined pressure sensor;Esashi;Proc. IEEE,1998
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