Author:
Yong Li,Yunfei Zheng,Guang Yang,Liangqiang Peng
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Fundamental aspects and applications of electrochemical microfabrication;Datta;Electrochim. Acta,2000
2. Electrochemical micromachining;Van Osenbruggen;Philips Tech. Rev.,1985
3. Microfabrication by electrochemical metal removal;Datta;IBM J. Res. Dev.,1998
4. Fabriacation of free standing structure using single step electrochemical etching in hydrofluoric acid;Ohji;Sens. Actuators,1999
5. M. Suda, K. Nakajima, K. Furuta, Y. Mitsuoka, Electrochemical and optical processing of microstructures by scanning probe microscopy (SPM), in: Proceedings of the 1996 IEEE Micro Electro Mechanical System (MEMS), pp. 296–300.
Cited by
102 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献