Reduction of sidewall inclination and blast lag of powder blasted channels-Reference-Cited by-同舟云学术

Reduction of sidewall inclination and blast lag of powder blasted channels

Published:2002-12 Issue:1-2 Volume:102 Page:157-164
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wensink Henk,Elwenspoek Miko C

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. High quality mechanical etching of brittle materials by powder blasting;Slikkerveer;Sens. Actuators,2000

2. Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors;Schlautmann;J. Micromech. Microeng.,2001

3. The introduction of powder blasting for sensor and microsystem applications;Belloy;Sens. Actuators,2000

4. Mask materials for powder blasting;Wensink;J. Micromech. Microeng.,2000

5. Erosion of elastomeric protective coatings;Slikkerveer;Wear,1999

Cited by 44 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improvement of process repeatability and resolution in abrasive air jet machining via viscous slurry entrainment;Journal of Manufacturing Processes;2022-07

2. The effects of blast lag in abrasive jet machined micro-channel intersections;Precision Engineering;2020-03

3. Tapered mask and its effect on the fluid flow and machining efficiency of a multiphase jet;Journal of Manufacturing Processes;2020-02

4. Accuracy of the pattern transfer from the metal mask to the workpiece surface during multiphase jet machining;The International Journal of Advanced Manufacturing Technology;2019-12-12

5. Micropowder Blasting Simulation with Blasting Micropowder Size and Mask Erosion Using Cellular Automaton;2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII);2019-06