Author:
Chen Wen-Chih,Chu Chien-Cheng,Hsieh Jerwei,Fang Weileun
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Integrated movable micromechanical structures for sensors and actuators;Fan;IEEE Trans. Electron Dev.,1988
2. Laterally driven polysilicon resonant microstructures;Tang;Sensor Actuator A,1989
3. Controlled stepwise motion in polysilicon microstructures;Akiyama;J. Microelectromech. Syst.,1993
4. H. Matoba, T. Ishikawa, C.-J. Kim, R.S. Muller, A bistable snapping microactuator, in: Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, Oiso, Japan, January 1994, pp. 45–50.
5. C. Liu, T. Tsao, Y.C. Tai, Out of plane permalloy magnetic actuators for delta-wing control, in: Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, Amsterdam, Netherlands, January 1995, pp. 7–12.
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