Materials selection for microfabricated electrostatic actuators-Reference-Cited by-同舟云学术

Materials selection for microfabricated electrostatic actuators

Published:2003-01 Issue:3 Volume:102 Page:279-285
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Srikar V.T.,Spearing S.M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference49 articles.

1. The selection of mechanical actuators based on performance indices;Huber;Proc. R. Soc. London, Ser. A,1997

2. S.D. Senturia, Microsystem Design, Kluwer Academic Publishers, Norwell, MA, 2001.

3. Materials issues in microelectromechanical systems (MEMS);Spearing;Acta Mater.,2000

4. IC-compatible polysilicon surface micromachining;Sniegowski;Annu. Rev. Mater. Sci.,2000

5. Micromachined low-loss microwave switches;Yao;J. Microelectromech. Syst.,1999

Cited by 60 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications;Micromachines;2022-08-04

2. Robotic micromanipulation: a) actuators and their application;Robotic Systems and Applications;2021-06-30

3. Temperature drift-aware material selection of composite piezoresistive micro-cantilevers using Ashby’s methodology;Microsystem Technologies;2020-09-03

4. A systematic review on material selection methods;Proceedings of the Institution of Mechanical Engineers, Part L: Journal of Materials: Design and Applications;2020-05-12

5. Geometrically Structured Nanomaterials for Nanosensors, NEMS, and Nanosieves;Advanced Materials;2020-04-06