Microfabrication of freestanding metal structures using graphite substrate-Reference-Cited by-同舟云学术

Microfabrication of freestanding metal structures using graphite substrate

Published:2003-01 Issue:1-2 Volume:103 Page:182-186
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Makarova Olga V.,Mancini Derrick C.,Moldovan Nicolaie,Divan Ralu,Tang Cha-Mei,Ryding David G.,Lee Richard H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

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3. Alternative resist adhesion and electroplating layers for LIGA process;El-Kholi;Microsyst. Technol.,2000

4. Graphite-based X-ray masks for deep and ultra-deep X-ray lithography;Coane;J. Vac. Sci. Technol. B,1998

5. H. Guckel, T.R. Christenson, K. Skrobis, Formation of microstructures using a preformed photoresist, US Patent 5,378,583 (1995).

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