Development of a bi-directional valve-less silicon micro pump controlled by driving waveform

Author:

Hayamizu Shunichi,Higashino Kusunoki,Fujii Yasuhisa,Sando Yasuhiro,Yamamoto Koji

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. A bi-directional silicon micropump;Zengerle;Sens. Actuators A,1995

2. Micromachined flat-walled valveless diffuser pumps;Olsson;J. Microelectromech. Syst.,1997

3. S. Matsumoto, A. Klein, R. Maeda, Development of bi-directional valve-less micropump for liquid, in: Proceedings of the IEEE MEMS 1999, Tech. Digest, Orland, FL, USA, January 17, 1999.

4. W. Wijngaat, H. Anderson, P. Enoksson, K. Noren, G. Stemme, The first self-priming and bi-directional valve-less diffuser micropump for both liquid and gas, in: Proceedings of the IEEE MEMS 1999, Tech. Digest, Orland, FL, USA, January 23, 2000.

5. K. Higashino, Simulation of fluid dynamics in ink-jet head, in: Proceedings of the Japan Hardcopy’99 Fall Meeting, Kyoto, Japan, December 3rd, 1999.

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