In situ slider-to-disk spacing on a nanometer scale controlled by microheater-induced slider deformations-Reference-Cited by-同舟云学术

In situ slider-to-disk spacing on a nanometer scale controlled by microheater-induced slider deformations

Published:2002-08 Issue:1 Volume:100 Page:123-130
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Dietzel A.,Berger R.,Mächtle P.,Despont M.,Häberle W.,Stutz R.,Binnig G.K.,Vettiger P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

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5. A.P. Deshpande, R.T. Kerth, H.M. Nier, Process for independent control of crown and camber for magnetic head sliders, United States Patent US 5,266,769 (1993).

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