Design and fabrication of a thermal infrared emitter

Author:

Bauer D.,Heeger M.,Gebhard M.,Benecke W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

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2. Electrical and optical characteristics of vacuum-sealed polysilicon microlamps;Mastrangelo;IEEE Trans. Electron Devices,1992

3. Surface micromachined pressure transducers;Guckel;Sensors and Actuators A,1991

4. Wafer fusion bonding: characterization of the bond quality;Harendt;Sensors Mater.,1992

5. Diffraktive Linsen — moderne mikrooptische Elemente;Zarschitzky;Siemens-Zeitschrift Special FuE,1994

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