Fabrication of improved piezoresistive silicon cantilever probes for the atomic force microscope

Author:

Su Y,Evans A.G.R,Brunnschweiler A,Ensell G,Koch M

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Atomic force microscope;Binnig;Phys. Rev. Lett.,1986

2. Micromachined silicon sensors for scanning force microscopy;Wolter;J. Vac. Sci. Technol.,1991

3. A novel process for fabricating force sensors for atomic force microscopy;Farooqui,1992

4. Piezoresistive cantilevers utilized for scanning tunneling and scanning force microscope in ultrahigh vacuum;Giessibl;Rev. Sci. Instrum.,1994

5. Strength of Materials, part 1, Elementary Theory and Problems;Timoshenko,1955

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