Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon-Reference-Cited by-同舟云学术

Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon

Published:1998-10 Issue:1-2 Volume:70 Page:23-31
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Comtois John H.,Michalicek M. Adrian,Barron Carole Craig

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Application of chemical-mechanical polishing to planarization of surface-micromachined devices;Nasby,1996

2. Multi-User MEMS Processes (MUMPs) Introduction and Design Rules;Koester,1994

3. Thermo-magnetic metal flexure actuators;Guckel,1992

4. Thermal micro-actuators for surface-micromachining processes;Comtois,1995

5. Micro-machined 1×2 optical fiber switch;Field,1995

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